For High Temperature Thin Film Deposition Equipment
Momentive Quartz Technologies Inc offers high temperature resistive or inductive heaters with a proprietary coating known as Tantalum Carbide (TaC). With its high temperature stability and high chemical resistance, TaC coated graphite heater provides a more robust heating solution that enhances the life of heaters in harsh environment, reduces equipment maintenance cycle/cost, and increase production yield.
製品の特長
>2200℃での高温安定性
超高純度
Hard coat with low particle release
Resistance to H2, NH3, SiH4, CH4
耐熱衝撃性
Stable hot electrical resistance
Robust electrical contact
コーティングカバレッジ性
Strong adhesive to graphite
Simple 1D to complex 3D shapes
主な用途
Resistive heating coil
CVD hot filament
Inductive heating plate
Inductive heating cylinder
高結晶性及び高均質性のTACコーティング
10µm
300µm
IR and Optical Image of TaC Heater at 1100°C
TaC Hot Filament Thermal Cycled to 2000°C at Rate 1000°C/min
